JPS5917552U - イオンビ−ム装置等における高圧導入碍子 - Google Patents

イオンビ−ム装置等における高圧導入碍子

Info

Publication number
JPS5917552U
JPS5917552U JP11261082U JP11261082U JPS5917552U JP S5917552 U JPS5917552 U JP S5917552U JP 11261082 U JP11261082 U JP 11261082U JP 11261082 U JP11261082 U JP 11261082U JP S5917552 U JPS5917552 U JP S5917552U
Authority
JP
Japan
Prior art keywords
insulator
ion beam
beam equipment
container
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11261082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328517Y2 (en]
Inventor
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP11261082U priority Critical patent/JPS5917552U/ja
Publication of JPS5917552U publication Critical patent/JPS5917552U/ja
Application granted granted Critical
Publication of JPS6328517Y2 publication Critical patent/JPS6328517Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP11261082U 1982-07-23 1982-07-23 イオンビ−ム装置等における高圧導入碍子 Granted JPS5917552U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11261082U JPS5917552U (ja) 1982-07-23 1982-07-23 イオンビ−ム装置等における高圧導入碍子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11261082U JPS5917552U (ja) 1982-07-23 1982-07-23 イオンビ−ム装置等における高圧導入碍子

Publications (2)

Publication Number Publication Date
JPS5917552U true JPS5917552U (ja) 1984-02-02
JPS6328517Y2 JPS6328517Y2 (en]) 1988-08-01

Family

ID=30260996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11261082U Granted JPS5917552U (ja) 1982-07-23 1982-07-23 イオンビ−ム装置等における高圧導入碍子

Country Status (1)

Country Link
JP (1) JPS5917552U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022244054A1 (ja) * 2021-05-17 2022-11-24 株式会社日立ハイテク 高電圧絶縁構造体、荷電粒子銃および荷電粒子ビーム装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7303662B2 (en) 2000-02-17 2007-12-04 Applied Materials, Inc. Contacts for electrochemical processing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439974U (en]) * 1977-08-24 1979-03-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439974U (en]) * 1977-08-24 1979-03-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022244054A1 (ja) * 2021-05-17 2022-11-24 株式会社日立ハイテク 高電圧絶縁構造体、荷電粒子銃および荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPS6328517Y2 (en]) 1988-08-01

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